High precision molds for the replication of structured optical elements like Fresnel lenses or prism arrays are generated by diamond machining or precision grinding. In some cases surface quality of the replicated components is not sufficient to meet the increasing demands concerning surface roughness and form accuracy for optical applications. Subsequent polishing of the structures may therefore be necessary. Within this work structured molds were finished by a newly developed abrasive polishing process, by laser polishing, and by abrasive flow machining. This paper focuses on the material removal mechanisms and achievable surface quality in abrasive polishing. Surface quality is compared to that achieved by laser polishing and abrasive flow machining.
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